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Equipment
电子束曝光系统
电子束曝光 JBX-6300FS
聚焦离子束系统 DB235
聚焦离子束系统 Helios
氦氖离子显微镜 ORION
紫外曝光系统
DTL光学曝光系统
飞秒激光三维直写系统
激光直写设备
纳米压印机
激光干涉曝光系统
反应离子刻蚀 Plasma80
反应离子刻蚀 NGP80
离子束刻蚀系统
电感耦合等离子体反应离子刻蚀 Plasma100
电感耦合等离子体反应离子刻蚀 Cobra
微波等离子体去胶机
热蒸发系统 RZF400
热蒸发系统 DZ-300
原子层沉积系统
电子束蒸发系统 Peva-600E
电子束蒸发系统 FU-12PEB
超高真空联合镀膜系统
等离子体增强化学气相沉积
微波等离子体化学气相沉积系统
热丝化学气相沉积
傅立叶变换光谱仪
纳米压痕仪
双探针扫描电镜
扫描探针显微镜 SPA-400
扫描探针显微镜 Bruker
综合物性测量系统
椭偏仪
多通道电化学工作站
表面形貌仪
白光干涉表面形貌仪
低温四探针电学测试平台
扫描近场光学显微镜
电磁热多参量测量系统
光学浮区单晶炉
红外反射谱仪
超导量子干涉仪
转靶X光衍射仪
振动样品磁强计
Double-aberration-corrected (scanning) transmission electron microscope
Ultraviolet laser-based ARPES
Home-made nuclear demagnetization refrigerator at IOP
Advanced combinatorial laser MBE integrated with liquid He STM, a prototype of MGI facilities
Focused ion beam etching & deposition system
Low-temperature high-magnetic field UHV dual STM
VUV laser-based angle-resolved photoemission spectrometer
Scanning Electron Microscope and X-Ray Microanalysis System
Temperature-jump nanosecond time-resolved transient mid-IR absorbance difference spectrometer
IBM Sp690 Regatta
Unisoku super low temperature and strong magnetic field UHV-STM system
RF-MBE
FEI Tecnai F20 SuperTwinFEG TEM
TEM-STM joint instrument
MBE-SPM-SMOKE
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