Properties and use of Non Evaporable Getter (NEG) pumps and their application in HV and UHV sientific and industrial systems
SAES Getters S.p.A
Dr. Dario received his doctor degree from the Università degli Studi di Catania, Italy. His academic career, mainly focused on experimental nuclear physics, beam physics and beam diagnostics. He joined the SAES Group in 2016 as Assistant Business Manager in the Vacuum Systems Business Unit. His core applications involve the use of Non Evaporable Getter (NEG) pumps in High and Ultra High Vacuum systems, encompassing a wide range of different applications, with a special focus on Research Institutes and Universities. Since 2018, he is the Business Manager for Physics Projects.
Non Evaporable Getters (NEGs) are very reactive alloys, generally made of zirconium or titanium, able to sorb active gases very efficiently in a vacuum system. Gas molecules are dissociated onto the getter surface and permanently trapped in the form of stable oxides, carbides or nitrides. Hydrogen, due to its small atomic radius, can quickly diffuse in the getter bulk even at room temperature, making NEG the ideal solution for H2 absorption. NEG materials can be assembled into high efficiency pumps, whose structures and properties are optimized to provide extremely high pumping speed for all active gases in UHV and XHV regime. In the present seminar, the key chemico-physical properties of NEG pumps will be presented, along with examples of applications. The main features and characteristics of ZAO based pumps, as well as examples of their real installation, will be shown. Compared to other vacuum pumps, NEG pumps’s unique features will be presented as well.
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